Patent Assignment Details
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| Reel/Frame: | 017764/0839 | |
| Pages: | 10 |
| | Recorded: | 04/07/2006 | | |
| Attorney Dkt #: | 268441US26X |
| Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT CONVEYING PARTIES |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/03/2010
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Application #:
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11292353
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Filing Dt:
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12/02/2005
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Publication #:
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Pub Dt:
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06/08/2006
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Title:
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CAPACITIVE COUPLING PLASMA PROCESSING APPARATUS
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Assignees
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO 105-8001, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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