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Reel/Frame:017801/0176   Pages: 3
Recorded: 04/21/2006
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11409326
Filing Dt:
04/21/2006
Publication #:
Pub Dt:
04/26/2007
Title:
METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING FEED FORWARD THERMAL CONTROL
Assignors
1
Exec Dt:
04/10/2006
2
Exec Dt:
04/10/2006
3
Exec Dt:
04/13/2006
4
Exec Dt:
04/20/2006
5
Exec Dt:
04/10/2006
6
Exec Dt:
04/11/2006
Assignee
1
LEGAL AFFAIRS DEPT., M/S 2061-LEGAL
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondence name and address
ROBERT M. WALLACE
LAW OFFICE OF ROBERT M. WALLACE
2112 EASTMAN AVENUE
SUITE 102
VENTURA, CA 93003

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