Patent Assignment Details
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| Reel/Frame: | 017910/0043 | |
| Pages: | 3 |
| | Recorded: | 05/23/2006 | | |
| Attorney Dkt #: | 03599.118925 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/03/2009
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Application #:
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11438459
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Filing Dt:
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05/23/2006
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Publication #:
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Pub Dt:
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12/07/2006
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Title:
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EXPOSURE METHOD THAT OBTAINS, PRIOR TO EXPOSURE, RETICLE SURFACE FORM DATA AND MEASUREMENT POSITION ERROR, FOR SCANNING CONTROL
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Assignee
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| 3-30-2, SHIMOMARUKO |
| OHTA-KU, TOKYO, JAPAN |
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Correspondence name and address
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FITZPATRICK CELLA HARPER, ET AL.
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30 ROCKEFELLER PLAZA
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NEW YORK, NY 10112-3801
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