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Patent Assignment Details
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Reel/Frame:018058/0465   Pages: 3
Recorded: 04/07/2006
Attorney Dkt #:648.45988x00
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/08/2008
Application #:
11362867
Filing Dt:
02/28/2006
Publication #:
Pub Dt:
03/15/2007
Title:
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
Assignors
1
Exec Dt:
02/14/2006
2
Exec Dt:
02/14/2006
3
Exec Dt:
02/14/2006
4
Exec Dt:
02/17/2006
5
Exec Dt:
02/14/2006
6
Exec Dt:
02/15/2006
7
Exec Dt:
02/14/2006
8
Exec Dt:
02/17/2006
Assignee
1
1-24-14, NISHI SHIMBASHI
MINATO-KU
TOKYO 105-8717, JAPAN
Correspondence name and address
ANTONELLI, TERRY, STOUT & KRAUS, LLP
1300 NORTH 17TH STREET, SUITE 1800
ARLINGTON, VA 22209

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