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Patent Assignment Details
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Reel/Frame:018100/0381   Pages: 3
Recorded: 07/07/2006
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10585408
Filing Dt:
07/07/2006
Publication #:
Pub Dt:
07/19/2007
Title:
Substrate processing apparatus
Assignors
1
Exec Dt:
03/16/2006
2
Exec Dt:
03/17/2006
3
Exec Dt:
03/16/2006
4
Exec Dt:
03/17/2006
Assignee
1
3-6, AKASAKA 5-CHOME, MINATO-KU,
TOKYO-TO, JAPAN
Correspondence name and address
SMITH, GAMBRELL & RUSSELL
1850 M STREET, N.W.
SUITE 800
WASHINGTON, DC 20036

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