Patent Assignment Details
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| Reel/Frame: | 018123/0953 | |
| Pages: | 2 |
| | Recorded: | 11/04/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10555613
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Filing Dt:
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11/04/2005
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Publication #:
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Pub Dt:
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01/04/2007
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Title:
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Plasma processing apparatus and method for manufacturing thereof
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Assignee
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| 4-4, NISHITEMMA 2-CHOME |
| KITA-KU, OSAKA-SHI |
| OSAKA 530-8565, JAPAN |
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Correspondence name and address
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SUGHRUE MION, PLLC
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2100 PENNSYLVANIA AVENUE, N.W.
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SUITE 800
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WASHINGTON, DC 20037
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