Patent Assignment Details
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| Reel/Frame: | 018154/0910 | |
| Pages: | 3 |
| | Recorded: | 07/26/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10587427
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Filing Dt:
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07/26/2006
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Publication #:
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Pub Dt:
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07/12/2007
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Title:
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Method for producing silicon nitride films and silicon oxynitride films by chemical vapor deposition
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Assignee
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| 75321 QUAI D'ORSAY CEDEX 07, FRANCE |
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Correspondence name and address
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LINDA K. RUSSELL
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2700 POST OAK BLVD., STE. 1800
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HOUSTON, TX 77056
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