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Reel/Frame:018242/0215   Pages: 2
Recorded: 09/13/2006
Attorney Dkt #:P/1250-321 V1357
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/06/2011
Application #:
11531428
Filing Dt:
09/13/2006
Publication #:
Pub Dt:
04/05/2007
Title:
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOSURE PROCESS
Assignor
1
Exec Dt:
08/14/2006
Assignee
1
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME,
HORIKAWA-DORI, KAMIGYO-KU
KYOTO, JAPAN 602-8585
Correspondence name and address
OSTROLENK, FABER, GERB & SOFFEN LLP
1180 AVENUE OF THE AMERICAS
NEW YORK, NY 10036

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