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Reel/Frame:018270/0015   Pages: 4
Recorded: 09/08/2006
Attorney Dkt #:25789.006
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/01/2008
Application #:
11489896
Filing Dt:
07/20/2006
Publication #:
Pub Dt:
01/25/2007
Title:
SURFACE POSITION MEASURING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Assignors
1
Exec Dt:
08/23/2006
2
Exec Dt:
08/24/2006
Assignee
1
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondence name and address
JOHN J. TORRENTE
COWAN LIEBOWITZ & LATMAN, P.C.
1133 AVENUE OF THE AMERICAS
NEW YORK, NY 10036

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