Patent Assignment Details
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| Reel/Frame: | 018316/0870 | |
| Pages: | 2 |
| | Recorded: | 09/21/2006 | | |
| Attorney Dkt #: | 006638.00015 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11524291
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Filing Dt:
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09/21/2006
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Publication #:
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Pub Dt:
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03/27/2008
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Title:
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Apparatus and method for heating semiconductor wafers with improved temperature uniformity
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Assignee
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| 9775 TOLEDO WAY |
| IRVINE, CALIFORNIA 92618 |
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Correspondence name and address
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BANNER & WITCOFF, LTD.
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1001 G STREET, N.W., 11TH FLOOR
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WASHINGTON, D.C. 20001-4597
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