Patent Assignment Details
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Reel/Frame: | 018321/0901 | |
| Pages: | 3 |
| | Recorded: | 09/28/2006 | | |
Attorney Dkt #: | KLA-P1856/US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/05/2009
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Application #:
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11532748
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Filing Dt:
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09/18/2006
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Title:
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TEMPEATRURE STABILIZATION FOR SUBSTRATE PROCESSING
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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JOSHUA D. ISENBERG
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809 CORPORATE WAY
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FREMONT, CA 94539
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