Patent Assignment Details
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Reel/Frame: | 018360/0988 | |
| Pages: | 6 |
| | Recorded: | 10/06/2006 | | |
Attorney Dkt #: | GK-OEH-246/500814.20148 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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11539342
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Filing Dt:
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10/06/2006
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Publication #:
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Pub Dt:
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04/12/2007
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Title:
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ARRANGEMENT FOR THE SUPPRESSION OF UNWANTED SPECTRAL COMPONENTS IN A PLASMA-BASED EUV RADIATION SOURCE
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Assignee
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GOESCHWITZER STRASSE 25 |
JENA, GERMANY D-07745 |
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Correspondence name and address
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REED SMITH LLP
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RUTH MONTALVO
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599 LEXTINGTON AVENUE
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NEW YORK, NY 10022-7650
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