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Reel/Frame:018360/0988   Pages: 6
Recorded: 10/06/2006
Attorney Dkt #:GK-OEH-246/500814.20148
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/13/2010
Application #:
11539342
Filing Dt:
10/06/2006
Publication #:
Pub Dt:
04/12/2007
Title:
ARRANGEMENT FOR THE SUPPRESSION OF UNWANTED SPECTRAL COMPONENTS IN A PLASMA-BASED EUV RADIATION SOURCE
Assignors
1
Exec Dt:
09/03/2006
2
Exec Dt:
08/30/2006
3
Exec Dt:
08/30/2006
4
Exec Dt:
08/30/2006
5
Exec Dt:
08/30/2006
Assignee
1
GOESCHWITZER STRASSE 25
JENA, GERMANY D-07745
Correspondence name and address
REED SMITH LLP
RUTH MONTALVO
599 LEXTINGTON AVENUE
NEW YORK, NY 10022-7650

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