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Reel/Frame:018384/0192   Pages: 5
Recorded: 10/10/2006
Attorney Dkt #:390-012406-US(PAR)
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/19/2013
Application #:
11442511
Filing Dt:
05/26/2006
Publication #:
Pub Dt:
11/29/2007
Title:
LINEARLY DISTRIBUTED SEMICONDUCTOR WORKPIECE PROCESSING TOOL
Assignors
1
Exec Dt:
09/01/2006
2
Exec Dt:
08/28/2006
3
Exec Dt:
08/08/2006
4
Exec Dt:
09/01/2006
Assignee
1
15 ELIZABETH DRIVE
CHELMSFORD, MASSACHUSETTS 01824
Correspondence name and address
JANIK MARCOVICI
PERMAN & GREEN, LLP
425 POST ROAD
FAIRFIELD, CT 06824

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