Patent Assignment Details
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| Reel/Frame: | 018409/0408 | |
| Pages: | 2 |
| | Recorded: | 10/04/2006 | | |
| Attorney Dkt #: | 1113.45832X00 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10566241
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Filing Dt:
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10/04/2006
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Publication #:
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Pub Dt:
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03/08/2007
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Title:
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Microwave plasma processing method, microwave plasma processing apparatus, and its plasma head
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Assignees
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| 3RD FLOOR, HAKUA BLDG. |
| 2-4-1, AKASAKA, MINATO-KU |
| TOKYO 107-0052, JAPAN |
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| 1-17-301, KOMEGAFUKURO 2-CHOME |
| AOBA-KU, SENDAI-SHI |
| MIYAGI, 980-0813, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT & KRAUS, LLP
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1300 NORTH 17TH STREET - SUITE 1800
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ARLINGTON, VA 22209
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