Patent Assignment Details
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| Reel/Frame: | 018418/0853 | |
| Pages: | 7 |
| | Recorded: | 10/20/2006 | | |
| Attorney Dkt #: | 026531-007210US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/15/2008
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Application #:
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11112281
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Filing Dt:
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04/22/2005
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Publication #:
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Pub Dt:
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06/22/2006
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Title:
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CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
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Assignee
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU |
| KYOTO, JAPAN 600-8009 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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2 EMBARCADERO CENTER, 8TH FLOOR
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SAN FRANCISCO, CA 94111-3834
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