Patent Assignment Details
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| Reel/Frame: | 018479/0490 | |
| Pages: | 2 |
| | Recorded: | 10/31/2006 | | |
| Attorney Dkt #: | 06089/LH |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/24/2011
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Application #:
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10569167
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Filing Dt:
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10/24/2006
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Publication #:
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Pub Dt:
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08/30/2007
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Title:
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VACUUM DEVICE, OPERATION METHOD FOR VACUUM DEVICE, EXPOSURE SYSTEM, AND OPERATION METHOD FOR EXPOSURE SYSTEM
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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Correspondence name and address
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FRISHAUF, HOLTZ, GOODMAN & CHICK, PC
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220 FIFTH AVENUE
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16TH FLOOR
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NEW YORK, NY 10001-7708
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