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Reel/Frame:018564/0040   Pages: 8
Recorded: 11/29/2006
Attorney Dkt #:9726 P1 CPI/COPPER
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11511869
Filing Dt:
08/29/2006
Publication #:
Pub Dt:
03/15/2007
Title:
Integrated process for sputter deposition of a conductive barrier layer, especially an alloy of ruthenium and tantalum, underlying copper or copper alloy seed layer
Assignors
1
Exec Dt:
10/16/2006
2
Exec Dt:
10/13/2006
3
Exec Dt:
10/13/2006
4
Exec Dt:
11/03/2006
5
Exec Dt:
10/16/2006
6
Exec Dt:
10/17/2006
7
Exec Dt:
10/16/2006
8
Exec Dt:
10/13/2006
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
APPLIED MATERIALS, INC.
P. O. BOX 450 A
SANTA CLARA, CA 95052

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