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Reel/Frame:018683/0609   Pages: 5
Recorded: 12/27/2006
Attorney Dkt #:81880.0158
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/06/2011
Application #:
11571352
Filing Dt:
12/27/2006
Publication #:
Pub Dt:
01/24/2008
Title:
WAFER HEATING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Assignors
1
Exec Dt:
12/15/2006
2
Exec Dt:
12/15/2006
3
Exec Dt:
12/14/2006
Assignee
1
6, TAKEDA TOBADONO-CHO, FUSHIMI-KU
KYOTO-SHI, KYOTO, JAPAN 612-8501
Correspondence name and address
LAWRENCE J. MCCLURE
1999 AVENUE OF THE STARS, SUITE 1400
LOS ANGELES, CA 90067

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