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Reel/Frame:018686/0091   Pages: 3
Recorded: 12/28/2006
Attorney Dkt #:211843-00032
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/14/2011
Application #:
10519699
Filing Dt:
09/14/2005
Publication #:
Pub Dt:
05/11/2006
Title:
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
Assignor
1
Exec Dt:
09/10/2002
Assignee
1
34 SULLIVAN ROAD
UNIT #21
BILLERICA, MASSACHUSETTS 01862
Correspondence name and address
JOHN S. PANIAGUAS
525 WEST MONROE STREET
CHICAGO, IL 60661

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