Patent Assignment Details
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| Reel/Frame: | 018687/0769 | |
| Pages: | 4 |
| | Recorded: | 12/28/2006 | | |
| Attorney Dkt #: | 301388US2X |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11617165
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Filing Dt:
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12/28/2006
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Publication #:
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Pub Dt:
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07/12/2007
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Title:
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METHOD OF CALCULATING DEFLECTION ABERRATION CORRECTING VOLTAGE AND CHARGED PARTICLE BEAM WRITING METHOD
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Assignee
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| 2068-3, OOKA, NUMAZU-SHI |
| SHIZUOKA, JAPAN 410-8510 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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