Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 018712/0510 | |
| Pages: | 3 |
| | Recorded: | 12/14/2006 | | |
| Attorney Dkt #: | 10393.0001-00 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/2010
|
Application #:
|
11629535
|
Filing Dt:
|
12/14/2006
|
|
Publication #:
|
|
Pub Dt:
|
03/20/2008
| | | | |
|
Title:
|
EUV LIGHT SOURCE, EUV EXPOSURE EQUIPMENT, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
|
|
|
Assignee
|
|
|
|
|
| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
|
|
Correspondence name and address
|
| |
FINNEGAN, HENDERSON, FARABOW, GARRETT &
|
| |
LLP
|
| |
901 NEW YORK AVENUE, NW
|
| |
WASHINGTON, DC 20001-4413
|
Search Results as of:
05/13/2024 06:09 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
