Patent Assignment Details
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| Reel/Frame: | 018773/0946 | |
| Pages: | 2 |
| | Recorded: | 01/09/2007 | | |
| Attorney Dkt #: | 501.46747X00 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/19/2010
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Application #:
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11592175
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Filing Dt:
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11/03/2006
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Publication #:
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Pub Dt:
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05/10/2007
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Title:
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METHOD AND APPARATUS FOR SEMICONDUCTOR DEVICE PRODUCTION PROCESS MONITORING AND METHOD AND APPARATUS FOR ESTIMATING CROSS SECTIONAL SHAPE OF A PATTERN
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Assignee
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| 24-14, NISHISHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT & KRAUS, LLP
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1300 NORTH 17TH STREET - SUITE 1800
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ARLINGTON, VA 22209
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