Patent Assignment Details
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Reel/Frame: | 018774/0707 | |
| Pages: | 4 |
| | Recorded: | 01/05/2007 | | |
Attorney Dkt #: | 130808 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11631648
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Filing Dt:
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01/05/2007
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Publication #:
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Pub Dt:
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02/21/2008
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Title:
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Stage for Holding Silicon Wafer Substrate and Method for Measuring Temperature of Silicon Wafer Substrate
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Assignees
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SHUWA TORANOMON #2 BLDG. 5F |
1-21-19, TORANOMON, MINATO-KU |
TOKYO 105-0001, JAPAN |
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2-8-11, HIGASHINAKANOBU |
SHINAGAWA-KU, TOKYO 142-0052, JAPAN |
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404-2, KUZEOYABUCHO,MINAMI-KU |
KYOTO-SHI, KYOTO 601-8206, JAPAN |
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Correspondence name and address
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JAMES A. OLIFF
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OLIFF & BERRIDGE, PLC
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P.O. BOX 19928
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ALEXANDRIA, VA 22320
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