Patent Assignment Details
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| Reel/Frame: | 018845/0633 | |
| Pages: | 3 |
| | Recorded: | 02/02/2007 | | |
| Attorney Dkt #: | ASX-091 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/28/2011
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Application #:
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11639680
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Filing Dt:
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12/15/2006
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Publication #:
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Pub Dt:
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06/19/2008
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Title:
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INDUCTIVELY-COUPLED PLASMA SOURCE
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Assignee
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887 |
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Correspondence name and address
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PROSKAUER ROSE LLP
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ONE INTERNATIONAL PLACE
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BOSTON, MA 02110
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