Patent Assignment Details
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| Reel/Frame: | 018924/0967 | |
| Pages: | 4 |
| | Recorded: | 02/23/2007 | | |
| Attorney Dkt #: | 25789.007 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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11567311
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Filing Dt:
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12/06/2006
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Publication #:
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Pub Dt:
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06/07/2007
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Title:
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EXPOSURE METHOD AND APPARATUS, COATING APPARATUS FOR APPLYING RESIST TO PLURAL SUBSTRATES, AND DEVICE MANUFACTURING METHOD
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Assignee
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| 3-30-2, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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JOHN J. TORRENTE
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1133 AVENUE OF THE AMERICAS
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COWAN, LIEBOWITZ & LATMAN, P.C.
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NEW YORK, NY 10036-6799
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