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Reel/Frame:019031/0242   Pages: 5
Recorded: 03/19/2007
Attorney Dkt #:ASX-015CP2C2
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/02/2009
Application #:
11636891
Filing Dt:
12/11/2006
Publication #:
Pub Dt:
06/28/2007
Title:
INDUCTIVELY-COUPLED TOROIDAL PLASMA SOURCE
Assignors
1
Exec Dt:
08/21/1997
2
Exec Dt:
08/22/1997
3
Exec Dt:
08/25/1997
4
Exec Dt:
08/22/1997
Assignee
1
35 CABOT ROAD
WOBURN, MASSACHUSETTS 01801
Correspondence name and address
PROSKAUER ROSE LLP
ONE INTERNATIONAL PLACE
BOSTON, MA 02110

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