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Reel/Frame:019057/0620   Pages: 2
Recorded: 03/19/2007
Attorney Dkt #:1220.1006
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/24/2012
Application #:
11575392
Filing Dt:
03/15/2007
Publication #:
Pub Dt:
11/22/2007
Title:
SUBSTRATE HOLDING DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Assignors
1
Exec Dt:
01/30/2007
2
Exec Dt:
01/30/2007
3
Exec Dt:
01/30/2007
4
Exec Dt:
02/22/2007
5
Exec Dt:
01/30/2007
Assignee
1
2-3, MARUNOUCHI 3-CHOME
CHIYODA-KU, TOKYO 100-8331, JAPAN
Correspondence name and address
STAAS & HALSEY LLP
ATTENTION: PAUL I. KRAVETZ
1201 NEW YORK AVE., N.W., SUITE 700
WASHINGTON, D.C. 20005

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