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Patent Assignment Details

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Reel/Frame:	019224/0440			Pages:	32
		Recorded:	04/30/2007
Attorney Dkt #:	C2044-9001
Conveyance:	TRANSITION EXTENSION AND AMENDMENT AGREEMENT (REDACTED)

Total properties: 36

Patent #:	4745811	Issue Dt:	05/24/1988	Application #:	06792150	Filing Dt:	10/28/1985
Title:	PRESSURE MONITORING APPARATUS HAVING A HALL-EFFECT DETECTOR

Patent #:	4898036	Issue Dt:	02/06/1990	Application #:	07005830	Filing Dt:	01/21/1987
Title:	FLOW RESPONSIVE TRANSMITTER AND INDICATOR

Patent #:	4823603	Issue Dt:	04/25/1989	Application #:	07189780	Filing Dt:	05/03/1988
Title:	CAPACITANCE MANOMETER HAVING STRESS RELIEF FOR FIXED ELECTRODE

Patent #:	5118078	Issue Dt:	06/02/1992	Application #:	07701200	Filing Dt:	05/16/1991
Title:	BUTTERFLY VALVE HAVING IMPROVED SEALING CHARACTERISTICS

Patent #:	5218991	Issue Dt:	06/15/1993	Application #:	07872350	Filing Dt:	04/23/1992
Title:	REGULATOR FLOW CONTROL

Patent #:	5191793	Issue Dt:	03/09/1993	Application #:	07912007	Filing Dt:	07/10/1992
Title:	FLUID MASS FLOW METER DEVICE WITH REDUCED ATTITUDE SENSITIVITY

Patent #:	5413139	Issue Dt:	05/09/1995	Application #:	08078365	Filing Dt:	06/16/1993
Title:	THROTTLE VALVE

Patent #:	5396803	Issue Dt:	03/14/1995	Application #:	08088317	Filing Dt:	07/07/1993
Title:	DUAL BALANCED CAPACITANCE MANOMETERS FOR SUPPRESSING VIBRATION EFFECTS

Patent #:	5660207	Issue Dt:	08/26/1997	Application #:	08365861	Filing Dt:	12/29/1994
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

Patent #:	5785297	Issue Dt:	07/28/1998	Application #:	08682170	Filing Dt:	07/16/1996
Title:	VALVE MECHANISM

Patent #:	5850850	Issue Dt:	12/22/1998	Application #:	08685260	Filing Dt:	07/23/1996
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

Patent #:	5765283	Issue Dt:	06/16/1998	Application #:	08685322	Filing Dt:	07/23/1996
Title:	METHOD OF MAKING A FLOW CONTROLLER

Patent #:	5763774	Issue Dt:	06/09/1998	Application #:	08691061	Filing Dt:	08/01/1996
Title:	FLUID FLOW METER WITH REDUCED ORIENTATION SENSITIVITY

Patent #:	5901741	Issue Dt:	05/11/1999	Application #:	08860343	Filing Dt:	10/02/1997
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

Patent #:	6078030	Issue Dt:	06/20/2000	Application #:	09150458	Filing Dt:	09/09/1998
Title:	COMPONENT HEATER FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

Patent #:	6319743	Issue Dt:	11/20/2001	Application #:	09291468	Filing Dt:	04/14/1999
Title:	METHOD OF MAKING THIN FILM PIEZORESISTIVE SENSOR

Patent #:	6343617	Issue Dt:	02/05/2002	Application #:	09350744	Filing Dt:	07/09/1999
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

Patent #:	6575027	Issue Dt:	06/10/2003	Application #:	09350746	Filing Dt:	07/09/1999
Title:	MASS FLOW SENSOR INTERFACE CIRCUIT

Patent #:	6449571	Issue Dt:	09/10/2002	Application #:	09350747	Filing Dt:	07/09/1999
Title:	SYSTEM AND METHOD FOR SENSOR RESPONSE LINEARIZATION

Patent #:	6445980	Issue Dt:	09/03/2002	Application #:	09351098	Filing Dt:	07/10/1999
Title:	SYSTEM AND METHOD FOR A VARIABLE GAIN PROPORTIONAL-INTEGRAL (PI) CONTROLLER

Patent #:	6404612	Issue Dt:	06/11/2002	Application #:	09351111	Filing Dt:	07/10/1999
Title:	METHOD AND SYSTEM FOR DRIVING A SOLENOID

Patent #:	6389364	Issue Dt:	05/14/2002	Application #:	09351120	Filing Dt:	07/10/1999
Title:	SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER

Patent #:	7004453	Issue Dt:	02/28/2006	Application #:	09952083	Filing Dt:	09/12/2001
Title:	PENDULUM VALVE WITH A FULL RANGE OF POSITION CONTROL

Patent #:	6615870	Issue Dt:	09/09/2003	Application #:	09961595	Filing Dt:	09/24/2001
Publication #:	US20020011113	Pub Dt:	01/31/2002
Title:	SYSTEM AND METHOD FOR INTEGRATING GAS COMPONENTS

Patent #:	6681787	Issue Dt:	01/27/2004	Application #:	10006774	Filing Dt:	12/06/2001
Publication #:	US20020139418	Pub Dt:	10/03/2002
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

Patent #:	6714878	Issue Dt:	03/30/2004	Application #:	10062080	Filing Dt:	01/31/2002
Publication #:	US20020114732	Pub Dt:	08/22/2002
Title:	SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER

Patent #:	6734659	Issue Dt:	05/11/2004	Application #:	10064136	Filing Dt:	06/13/2002
Title:	ELECTRONIC INTERFACE FOR USE WITH DUAL ELECTRODE CAPACITANCE DIAPHRAGM GAUGES

Patent #:	6701790	Issue Dt:	03/09/2004	Application #:	10064137	Filing Dt:	06/13/2002
Publication #:	US20030231697	Pub Dt:	12/18/2003
Title:	TEMPERATURE REGULATOR FOR USE WITH A PRESSURE SENSING DEVICE

Patent #:	6640822	Issue Dt:	11/04/2003	Application #:	10068052	Filing Dt:	02/05/2002
Publication #:	US20020117202	Pub Dt:	08/29/2002
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

Patent #:	7000482	Issue Dt:	02/21/2006	Application #:	10178170	Filing Dt:	06/24/2002
Publication #:	US20030233882	Pub Dt:	12/25/2003
Title:	VARIABLE CAPACITANCE MEASURING DEVICE

Patent #:	6837111	Issue Dt:	01/04/2005	Application #:	10228612	Filing Dt:	08/27/2002
Publication #:	US20030233883	Pub Dt:	12/25/2003
Title:	VARIABLE CAPACITANCE MEASURING DEVICE COMPRISING A GLASS-CERAMIC INSULATOR

Patent #:	7010983	Issue Dt:	03/14/2006	Application #:	10848739	Filing Dt:	05/19/2004
Publication #:	US20050011271	Pub Dt:	01/20/2005
Title:	METHOD FOR DIGITALLY CONTROLLING A SENSOR SYSTEM

Patent #:	7412986	Issue Dt:	08/19/2008	Application #:	10887591	Filing Dt:	07/09/2004
Publication #:	US20060005882	Pub Dt:	01/12/2006
Title:	METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER

Patent #:	7424895	Issue Dt:	09/16/2008	Application #:	10946031	Filing Dt:	09/21/2004
Publication #:	US20060011237	Pub Dt:	01/19/2006
Title:	METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER

Patent #:	7043994	Issue Dt:	05/16/2006	Application #:	10952508	Filing Dt:	09/28/2004
Publication #:	US20050039535	Pub Dt:	02/24/2005
Title:	VARIABLE CAPACITANCE MEASURING DEVICE

Patent #:	D390138	Issue Dt:	02/03/1998	Application #:	29057079	Filing Dt:	07/16/1996
Title:	INVENTORY CONTROL PROBE

Assignor

ENTEGRIS, INC.

Exec Dt:

12/06/2006

Assignee

CELERITY, INC.

200 C. PARKER DRIVE

AUSTIN, TEXAS 78729

Correspondence name and address
	ROBERT A. SKRIVANEK, JR.
	ONE MAIN STREET
	LOWRIE, LANDO & ANASTASI
	CAMBRIDGE, MA 02142

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