Patent Assignment Details
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| Reel/Frame: | 019239/0089 | |
| Pages: | 4 |
| | Recorded: | 05/02/2007 | | |
| Attorney Dkt #: | APPM/8024 C1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11743413
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Filing Dt:
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05/02/2007
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Publication #:
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Pub Dt:
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08/30/2007
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Title:
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APPARATUS TO IMPROVE WAFER TEMPERATURE UNIFORMITY FOR FACE-UP WET PROCESSING
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Assignee
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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KEITH TABOADA, ESQ.
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595 SHREWSBURY AVENUE
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SUITE 100
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SHREWSBURY, NJ 07702
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