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Patent #:
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Issue Dt:
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06/16/1987
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Application #:
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06707262
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Filing Dt:
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03/01/1985
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Title:
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FLUIDIZED BED HEATER FOR SEMICONDUCTOR PROCESSING
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Patent #:
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Issue Dt:
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02/10/1987
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Application #:
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06804954
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Filing Dt:
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12/05/1985
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Title:
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CHEMICAL VAPOR DEPOSITION WAFER BOAT
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Patent #:
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Issue Dt:
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09/22/1987
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Application #:
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06828625
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Filing Dt:
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02/10/1986
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Title:
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CHEMICAL VAPOR DEPOSITION WAFER BOAT
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Patent #:
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Issue Dt:
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03/01/1988
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Application #:
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06845212
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Filing Dt:
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03/27/1986
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Title:
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PULSEWIDTH MODULATED PRESSURE CONTROL SYSTEM FOR CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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09/13/1988
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Application #:
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06864077
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Filing Dt:
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05/16/1986
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Title:
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METHOD AND APPARATUS FOR TRANSFERRING WAFERS BETWEEN CASSETTES AND A BOAT
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Patent #:
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Issue Dt:
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01/26/1988
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Application #:
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06880460
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Filing Dt:
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06/30/1986
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Title:
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SEMICONDUCTOR WAFER BOAT LOADER RELEASABLE MOUNTING
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Patent #:
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Issue Dt:
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01/19/1988
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Application #:
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06899923
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Filing Dt:
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08/25/1986
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Title:
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LOW TEMPERATURE SILICON NITRIDE CVD PROCESS
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Patent #:
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Issue Dt:
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01/26/1988
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Application #:
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07048868
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Filing Dt:
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05/12/1987
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Title:
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WAFER TRANSFER STAND
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Patent #:
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Issue Dt:
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07/04/1989
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Application #:
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07068727
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Filing Dt:
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06/29/1987
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Title:
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LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF SILICON DIOXIDE FILMS
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Patent #:
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Issue Dt:
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05/30/1989
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Application #:
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07114326
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Filing Dt:
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10/27/1987
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Title:
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CVD REACTOR AND GAS INJECTION SYSTEM
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Patent #:
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Issue Dt:
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05/30/1989
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Application #:
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07128806
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Filing Dt:
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12/04/1987
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Title:
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ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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07/04/1989
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Application #:
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07131850
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Filing Dt:
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12/11/1987
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Title:
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ION ETCHING AND CHEMICAL VAPOUR DEPOSITION
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Patent #:
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Issue Dt:
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12/12/1989
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Application #:
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07181787
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Filing Dt:
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04/15/1988
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Title:
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HOT WALL DIFFUSION FURNACE AND METHOD FOR OPERATING THE FURNACE
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Patent #:
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Issue Dt:
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01/02/1990
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Application #:
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07214909
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Filing Dt:
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06/29/1988
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Title:
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PROCESS FOR BOROSILICATE GLASS FILMS FOR MULTILEVEL METALLIZATION STRUCTURES IN SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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02/05/1991
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Application #:
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07365533
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Filing Dt:
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06/13/1989
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Title:
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HIGH DENSITY PLASMA DEPOSITION AND ETCHING APPARATUS
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Patent #:
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Issue Dt:
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02/19/1991
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Application #:
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07386903
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Filing Dt:
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07/28/1989
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Title:
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CHEMICAL VAPOR DEPOSITION REACTOR AND METHOD OF OPERATION
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Patent #:
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Issue Dt:
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10/22/1991
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Application #:
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07409125
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Filing Dt:
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09/19/1989
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Title:
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MULTI-ZONE PLANAR HEATER ASSEMBLY AND METHOD OF OPERATION
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Patent #:
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Issue Dt:
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05/19/1992
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Application #:
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07513807
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Filing Dt:
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04/24/1990
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Title:
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SELF CLEANING FLOW CONTROL ORIFICE
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Patent #:
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Issue Dt:
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08/11/1992
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Application #:
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07542243
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Filing Dt:
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06/21/1990
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Title:
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INJECTOR AND METHOD FOR DELIVERING GASEOUS CHEMICALS TO A SURFACE
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Patent #:
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Issue Dt:
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02/25/1992
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Application #:
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07545636
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Filing Dt:
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06/29/1990
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Title:
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HIGH DENSITY PLASMA DEPOSITION AND ETCHING APPARATUS
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Patent #:
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Issue Dt:
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02/18/1992
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Application #:
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07570122
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Filing Dt:
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08/17/1990
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Title:
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ELECTRICALLY INSULATING PIPE COUPLING APPARATUS
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Patent #:
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Issue Dt:
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01/07/1992
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Application #:
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07601270
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Filing Dt:
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10/22/1990
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Title:
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LIQUID SOURCE BUBBLER
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Patent #:
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Issue Dt:
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07/09/1991
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Application #:
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07601408
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Filing Dt:
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10/23/1990
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Title:
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LIQUID LEVEL SENSOR ASSEMBLY
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Patent #:
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Issue Dt:
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06/16/1992
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Application #:
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07650788
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Filing Dt:
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02/04/1991
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Title:
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HIGH DENSITY PLASMA DEPOSITION AND ETCHING APPARATUS
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Patent #:
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Issue Dt:
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06/16/1992
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Application #:
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07668858
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Filing Dt:
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03/13/1991
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Title:
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METHOD FOR PRODUCING HIGHLY CONDUCTIVE AND TRANSPARENT FILMS OF TIN AND FLUORINE DOPED INDIUM OXIDE BY APCVD
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Patent #:
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Issue Dt:
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06/14/1994
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Application #:
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07691470
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Filing Dt:
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04/25/1991
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Title:
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PRIMARY FLOW CVD APPARATUS COMPRISING GAS PREHEATER AND MEANS FOR SUBSTANTIALLY EDDY-FREE GAS FLOW
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Patent #:
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Issue Dt:
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02/02/1993
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Application #:
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07699577
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Filing Dt:
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05/14/1991
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Title:
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WORKPIECE SUPPORT
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Patent #:
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Issue Dt:
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06/06/1995
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Application #:
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07964149
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Filing Dt:
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10/19/1992
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Title:
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HIGH DENSITY PLASMA DEPOSITION AND ETCHING APPARATUS
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Patent #:
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Issue Dt:
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07/04/1995
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Application #:
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07979574
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Filing Dt:
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11/20/1992
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Title:
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HIGH DENSITY PLASMA DEPOSITION AND ETCHING APPARATUS
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Patent #:
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Issue Dt:
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02/20/1996
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Application #:
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08244573
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Filing Dt:
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08/01/1994
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Title:
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DEPOSITION APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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06/18/1996
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Application #:
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08291575
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Filing Dt:
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08/16/1994
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Title:
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METHOD FOR FILING SUBSTRATE RECESSES USING ELEVATED TEMPERATURE AND PRESSURE
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08362429
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Filing Dt:
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12/28/1994
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Title:
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METHOD OF TREATING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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05/06/1997
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Application #:
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08399108
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Filing Dt:
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03/03/1995
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Title:
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THERMAL PROCESSING APPARATUS AND PROCESS
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Patent #:
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Issue Dt:
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05/21/1996
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Application #:
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08426018
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Filing Dt:
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04/20/1995
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Title:
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METHOD AND APPARATUS FOR SUBJECTING A WORKPIECE TO ELEVATED PRESSURE
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08530195
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Filing Dt:
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10/02/1995
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Title:
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FORMING A LAYER
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Patent #:
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Issue Dt:
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04/08/1997
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Application #:
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08563875
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Filing Dt:
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11/28/1995
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Title:
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THERMAL PROCESSING APPARATUS AND PROCESS
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Patent #:
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Issue Dt:
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01/12/1999
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Application #:
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08578660
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Filing Dt:
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01/05/1996
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Title:
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METHOD OF TREATING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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11/19/1996
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Application #:
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08591026
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Filing Dt:
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01/25/1996
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Title:
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PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08621772
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Filing Dt:
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03/22/1996
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Title:
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SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
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Patent #:
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Issue Dt:
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07/28/1998
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Application #:
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08704227
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Filing Dt:
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08/27/1996
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Title:
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METHOD OF STRESS-RELIEVING SILICON OXIDE FILMS
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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08727303
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Filing Dt:
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10/08/1996
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Title:
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METHOD OF PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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12/21/1999
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Application #:
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08827542
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Filing Dt:
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03/28/1997
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Title:
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THERMAL PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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08831600
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Filing Dt:
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04/10/1997
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Title:
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METHOD FOR FILLING SUBSTRATE RECESSES USING PRESSURE, AND HEAT TREATMENT
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Patent #:
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Issue Dt:
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08/17/1999
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Application #:
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08838882
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Filing Dt:
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04/14/1997
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Title:
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EXHAUST VENT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION SYSTEMS
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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08869085
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Filing Dt:
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06/04/1997
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Title:
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METHOD OF MANUFACTURING AN INJECTOR FOR CHEMICAL VAPOR DEPOSITION PROCESSING
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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08892469
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Filing Dt:
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07/14/1997
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Title:
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SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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08918852
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Filing Dt:
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08/26/1997
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Title:
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METHOD AND STRUCTURE FOR CONTROLLING PLASMA
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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08975449
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Filing Dt:
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11/21/1997
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Title:
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METHOD OF REMOVING SURFACE OXIDES FOUND ON A TITANIUM OXYNITRIDE LAYER USING A NITROGEN CONTAINING PLASMA
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Patent #:
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Issue Dt:
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01/16/2001
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Application #:
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08975705
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Filing Dt:
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11/21/1997
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Title:
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METHODS OF FORMING A BARRIER LAYER
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Patent #:
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Issue Dt:
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08/31/1999
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Application #:
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08976928
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Filing Dt:
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11/24/1997
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Title:
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PROTECTIVE GAS SHIELD FOR CHEMICAL VAPOR DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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12/15/1998
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Application #:
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09008024
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Filing Dt:
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01/16/1998
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Title:
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FREE FLOATING SHIELD
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Patent #:
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Issue Dt:
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08/15/2000
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Application #:
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09022056
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Filing Dt:
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02/10/1998
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Title:
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DOUBLE WALL REACTION CHAMBER GLASSWARE
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09022057
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Filing Dt:
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02/10/1998
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Title:
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SEMICONDUCTOR THERMAL PROCESSOR WITH RECIRCULATING HEATER EXHAUST COOLING SYSTEM
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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09055185
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Filing Dt:
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04/06/1998
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Title:
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APPARATUS FOR APPLYING PRESSURE TO A COATED SURFACE OF A WORKPIECE
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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09067704
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Filing Dt:
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04/28/1998
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Title:
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METHOD OF MAKING LOW KAPPA DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS
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Patent #:
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Issue Dt:
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03/13/2001
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Application #:
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09113823
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Filing Dt:
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07/10/1998
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Title:
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SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09150669
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Filing Dt:
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09/10/1998
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Title:
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ELECTROSTATIC CHUCKS
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09152673
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Filing Dt:
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09/14/1998
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Title:
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PLATEN FOR SEMICONDUCTOR WORKPIECES
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09174578
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Filing Dt:
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10/19/1998
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Title:
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METHOD OF TREATING A SEMICONDUCTOR WAFER IN A CHAMBER USING HYDROGEN PEROXIDE AND SILICON CONTAINING GAS OR VAPOR
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Issue Dt:
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05/02/2000
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Application #:
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09185180
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Filing Dt:
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11/03/1998
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Title:
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FREE FLOATING SHIELD AND SEMICONDUCTOR PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09214492
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Filing Dt:
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07/30/1999
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Title:
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HIGH PRESSURE SEAL
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09251157
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Filing Dt:
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02/17/1999
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Title:
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METHODS AND APPARATUS FOR TREATING A SEMICONDUCTOR SUBSTRATE
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09339401
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Filing Dt:
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06/23/1999
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Title:
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FOIL FOR USE IN FILING SUBSTRATE RECESSES
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09361667
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Filing Dt:
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07/27/1999
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Title:
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LOW K DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS AND METHOD OF MAKING
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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09373894
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Filing Dt:
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08/12/1999
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Title:
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HOT WALL RAPID THERMAL PROCESSOR
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09414717
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Filing Dt:
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10/12/1999
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Title:
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APPARATUS AND METHODS FOR SPUTTERING
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09446432
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Filing Dt:
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01/02/2001
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Title:
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APPARATUS FOR PROCESSING WORKPIECES
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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09462465
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Filing Dt:
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03/17/2000
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Title:
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METHOD OF FILLING A RECESS
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09477819
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Filing Dt:
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01/05/2000
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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SPUTTERING APPARATUS
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09480730
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Filing Dt:
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01/06/2000
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Title:
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CHEMICAL VAPOR DEPOSITION SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09492420
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Filing Dt:
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01/27/2000
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Title:
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Free floating shield and semiconductor processing system
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Patent #:
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Issue Dt:
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11/07/2000
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Application #:
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09493492
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Filing Dt:
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01/28/2000
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Title:
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Wafer processing reactor having a gas flow control system and method
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09518141
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Filing Dt:
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03/03/2000
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Title:
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GAS DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09541395
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Filing Dt:
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03/31/2000
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Title:
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Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth
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Patent #:
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12/14/2004
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09548014
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Filing Dt:
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04/12/2000
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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METHOD AND DEPOSITING A LAYER
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Patent #:
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Issue Dt:
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07/15/2003
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09554290
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Filing Dt:
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05/11/2000
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Title:
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METHOD OF TREATING AN ISULATING LAYER
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Patent #:
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Issue Dt:
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03/18/2003
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09568987
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Filing Dt:
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05/11/2000
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Title:
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DEPOSITION APPARATUS
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Patent #:
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Issue Dt:
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06/10/2003
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09574826
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Filing Dt:
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05/19/2000
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Title:
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PROTECTIVE GAS SHIELD APPARATUS
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Patent #:
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Issue Dt:
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11/05/2002
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09582859
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Filing Dt:
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07/06/2000
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Title:
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DEPOSITION OF A SILOXANE CONTAINING POLYMER
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Patent #:
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04/08/2003
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09601086
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Filing Dt:
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08/18/2000
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Title:
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Method for treating silicon containing polymer layers with plasma or electromagnetic radiation
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Patent #:
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01/10/2006
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09628563
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07/31/2000
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Title:
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APPARATUS AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF SUBSTRATES
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10/08/2002
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09638113
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Filing Dt:
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08/11/2000
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Title:
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HOT WALL RAPID THERMAL PROCESSOR
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Patent #:
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11/04/2003
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09667329
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Filing Dt:
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09/21/2000
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Title:
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DELIVERY OF LIQUID PRECURSORS TO SEMICONDUCTOR PROCESSING REACTORS
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12/17/2002
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09673081
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03/29/2001
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INDUCTIVE COIL ASSEMBLY HAVING MULTIPLE COIL SEGMENTS FOR PLASMA PROCESSING APPARATUS
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06/11/2002
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09704714
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11/03/2000
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Title:
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METHOD OF FORMING A BARRIER LAYER
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02/18/2003
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09757542
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01/09/2001
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06/28/2001
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Title:
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SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
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09/30/2003
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09760820
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01/17/2001
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10/18/2001
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Title:
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METHODS AND APPARATUS FOR FORMING A FILM ON A SUBSTRATE
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03/11/2003
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09834880
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04/16/2001
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10/25/2001
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Title:
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METHOD OF COOLING AN INDUCTION COIL
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02/11/2003
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09901615
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Filing Dt:
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07/11/2001
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Pub Dt:
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11/22/2001
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Title:
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HIGH PRESSURE SEAL
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12/10/2002
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09934952
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08/21/2001
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Pub Dt:
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01/31/2002
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Title:
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HOT WALL RAPID THERMAL PROCESSOR
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11/25/2003
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09942933
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08/31/2001
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05/09/2002
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Title:
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DIELECTRIC LAYER FOR A SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
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01/25/2005
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09996869
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11/27/2001
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03/21/2002
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Title:
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SEMICONDUCTOR WAFER PROCESSING SYSTEM WITH VERTICALLY-STACKED PROCESS CHAMBERS AND SINGLE-AXIS DUAL-WAFER TRANSFER SYSTEM
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04/18/2006
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10029158
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12/21/2001
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09/26/2002
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APPARATUS AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF SUBSTRATES
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03/30/2004
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10056625
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01/25/2002
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MULTILAYER HIGH KAPPA DIELECTRIC FILMS
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05/31/2005
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10068127
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02/06/2002
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10/03/2002
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INERTIAL TEMPERATURE CONTROL SYSTEM AND METHOD
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03/08/2005
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10095974
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03/08/2002
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09/11/2003
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SYSTEM AND METHOD TO CONTROL RADIAL DELTA TEMPERATURE
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11/18/2003
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10106823
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03/27/2002
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10/03/2002
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METHOD OF ETCHING A SUBSTRATE
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04/05/2005
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10182869
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08/01/2002
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01/02/2003
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ELECTROSTATIC CLAMPING
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05/10/2005
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10194639
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07/12/2002
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02/27/2003
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MODULAR INJECTOR AND EXHAUST ASSEMBLY
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07/13/2004
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10226773
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08/23/2002
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05/22/2003
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ATMOSPHERIC PRESSURE WAFER PROCESSING REACTOR HAVING AN INTERNAL PRESSURE CONTROL SYSTEM AND METHOD
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