Patent Assignment Details
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| Reel/Frame: | 019289/0068 | |
| Pages: | 4 |
| | Recorded: | 05/14/2007 | | |
| Attorney Dkt #: | TI-60387 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11614185
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Filing Dt:
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12/21/2006
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Publication #:
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Pub Dt:
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06/26/2008
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Title:
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HYDROGEN GAS/HELIUM PRE-CLEAN AND PHYSICAL ETCH PRIOR TO METAL-BARRIER DEPOSITION IN COPPER DAMASCENE PROCESS
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Assignee
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| 7839 CHURCHILL WAY |
| M.S. 3999 |
| DALLAS, TEXAS 75251 |
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Correspondence name and address
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PETER K. MCLARTY
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7839 CHURCHILL WAY
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M.S. 3999
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DALLAS, TX 75251
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