Patent Assignment Details
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Reel/Frame: | 019342/0871 | |
| Pages: | 5 |
| | Recorded: | 05/08/2007 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/04/2010
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Application #:
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11801269
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Filing Dt:
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05/08/2007
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Publication #:
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Pub Dt:
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11/13/2008
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Title:
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THERMAL METHODS FOR CLEANING POST-CMP WAFERS
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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CARR & FERRELL LLP
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PATENT DEPARTMENT
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2200 GENG ROAD
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PALO ALTO, CALIFORNIA 94303
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