Patent Assignment Details
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| Reel/Frame: | 019347/0680 | |
| Pages: | 4 |
| | Recorded: | 05/25/2007 | | |
| Attorney Dkt #: | 294256US26PCT |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/13/2010
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Application #:
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10587394
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Filing Dt:
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07/27/2006
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Publication #:
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Pub Dt:
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08/09/2007
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Title:
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METHOD FOR CLEANING PROCESS CHAMBER OF SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR PROCESSING SUBSTRATE
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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