Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 019352/0354 | |
| Pages: | 4 |
| | Recorded: | 05/30/2007 | | |
| Attorney Dkt #: | 309466US2X |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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11754771
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Filing Dt:
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05/29/2007
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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PATTERN WRITING CIRCUIT SELF-DIAGNOSIS METHOD FOR CHARGED BEAM PHOTOLITHOGRAPHY APPARATUS AND CHARGED BEAM PHOTOLITHOGRAPHY APPARATUS
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Assignee
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| 2068-3 OOKA |
| NUMAZU-SHI, SHIZUOKA, JAPAN 410-8510 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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