Patent Assignment Details
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| Reel/Frame: | 019376/0209 | |
| Pages: | 8 |
| | Recorded: | 06/04/2007 | | |
| Attorney Dkt #: | VAR-010 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11687822
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Filing Dt:
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03/19/2007
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Publication #:
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Pub Dt:
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09/27/2007
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Title:
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Method of Plasma Processing with In-Situ Monitoring and Process Parameter Tuning
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Assignee
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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KURT RAUSCHENBACH
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P.O. BOX 387
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BEDFORD, MA 01730
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