Patent Assignment Details
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| Reel/Frame: | 019439/0176 | |
| Pages: | 5 |
| | Recorded: | 06/15/2007 | | |
| Attorney Dkt #: | LAM1P249/P1653 |
| Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT THE ATTONEY DOCKET NUMBER PREVIOUSLY RECORDED ON REEL 019377 FRAME 0635. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT DOCUMENT. |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/08/2009
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Application #:
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11757950
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Filing Dt:
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06/04/2007
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Publication #:
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Pub Dt:
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12/04/2008
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Title:
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METHOD FOR REDUCING MICROLOADING IN ETCHING HIGH ASPECT RATIO STRUCTURES
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BEYER WEAVER LLP
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P.O. BOX 70250
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OAKLAND, CA 94612-0250
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