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Patent Assignment Details
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Reel/Frame:019444/0567   Pages: 4
Recorded: 06/18/2007
Attorney Dkt #:38083.00.0001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11409326
Filing Dt:
04/21/2006
Publication #:
Pub Dt:
04/26/2007
Title:
METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING FEED FORWARD THERMAL CONTROL
Assignor
1
Exec Dt:
05/31/2007
Assignee
1
18 QUEEN STREET
HAMILTON, BERMUDA
Correspondence name and address
MICHAEL J. TURGEON
222 N. LASALLE STREET
SUITE 2500
CHICAGO, IL 60601

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