Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 019822/0714 | |
| Pages: | 4 |
| | Recorded: | 09/13/2007 | | |
| Attorney Dkt #: | 026531-005010US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/03/2009
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Application #:
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11763352
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Filing Dt:
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06/14/2007
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Publication #:
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Pub Dt:
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07/17/2008
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Title:
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METHOD AND SYSTEM FOR DETECTION OF WAFER CENTERING IN A TRACK LITHOGRAPHY TOOL
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Assignee
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU |
| SHIMOGYO-KU, KYOTO, JAPAN 600-8009 |
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Correspondence name and address
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CRAIG C. LARGENT
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TOWNSEND AND TOWNSEND AND CREW LLP
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TWO EMBARCADERO CENTER, EIGHTH FLOOR
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SAN FRANCISCO, CA 94111-3834
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