Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 019875/0828 | |
| Pages: | 6 |
| | Recorded: | 09/25/2007 | | |
| Attorney Dkt #: | AM11460/ETCH/MDD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/07/2010
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Application #:
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11861032
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Filing Dt:
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09/25/2007
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Publication #:
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Pub Dt:
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03/26/2009
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Title:
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METHOD OF PREVENTING ETCH PROFILE BENDING AND BOWING IN HIGH ASPECT RATIO OPENINGS BY TREATING A POLYMER FORMED ON THE OPENING SIDEWALLS
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Assignee
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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ROBERT W. MULCAHY
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P.O. BOX 450A
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LEGAL AFFAIRS DEPT.
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SANTA CLARA, CA 95052
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