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Total properties:
23
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Patent #:
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|
Issue Dt:
|
12/08/1987
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Application #:
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06864676
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Filing Dt:
|
05/19/1986
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Title:
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DIFFUSION FURNACE MULTIZONE TEMPERATURE CONTROL
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Patent #:
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Issue Dt:
|
01/26/1988
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Application #:
|
06880460
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Filing Dt:
|
06/30/1986
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Title:
|
SEMICONDUCTOR WAFER BOAT LOADER RELEASABLE MOUNTING
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|
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Patent #:
|
|
Issue Dt:
|
01/19/1988
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Application #:
|
06899923
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Filing Dt:
|
08/25/1986
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Title:
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LOW TEMPERATURE SILICON NITRIDE CVD PROCESS
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Patent #:
|
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Issue Dt:
|
01/26/1988
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Application #:
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07048868
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Filing Dt:
|
05/12/1987
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Title:
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WAFER TRANSFER STAND
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Patent #:
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Issue Dt:
|
12/12/1989
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Application #:
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07181787
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Filing Dt:
|
04/15/1988
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Title:
|
HOT WALL DIFFUSION FURNACE AND METHOD FOR OPERATING THE FURNACE
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Patent #:
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Issue Dt:
|
10/22/1991
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Application #:
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07409125
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Filing Dt:
|
09/19/1989
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Title:
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MULTI-ZONE PLANAR HEATER ASSEMBLY AND METHOD OF OPERATION
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Patent #:
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Issue Dt:
|
02/18/1992
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Application #:
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07570122
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Filing Dt:
|
08/17/1990
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Title:
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ELECTRICALLY INSULATING PIPE COUPLING APPARATUS
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Patent #:
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Issue Dt:
|
01/07/1992
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Application #:
|
07601270
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Filing Dt:
|
10/22/1990
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Title:
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LIQUID SOURCE BUBBLER
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|
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Patent #:
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Issue Dt:
|
06/16/1992
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Application #:
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07668858
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Filing Dt:
|
03/13/1991
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Title:
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METHOD FOR PRODUCING HIGHLY CONDUCTIVE AND TRANSPARENT FILMS OF TIN AND FLUORINE DOPED INDIUM OXIDE BY APCVD
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|
|
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Patent #:
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Issue Dt:
|
12/27/1994
|
Application #:
|
07971490
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Filing Dt:
|
11/04/1992
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|
Title:
|
GAS HEATER FOR PROCESSING GASES
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|
|
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Patent #:
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|
Issue Dt:
|
05/06/1997
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Application #:
|
08399108
|
Filing Dt:
|
03/03/1995
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Title:
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THERMAL PROCESSING APPARATUS AND PROCESS
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Patent #:
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|
Issue Dt:
|
07/28/1998
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Application #:
|
08704227
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Filing Dt:
|
08/27/1996
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Title:
|
METHOD OF STRESS-RELIEVING SILICON OXIDE FILMS
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|
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Patent #:
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Issue Dt:
|
01/05/1999
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Application #:
|
08801997
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Filing Dt:
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02/18/1997
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Title:
|
OPTIMIZATION OF SIO2 FILM CONFORMALITY IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION
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Patent #:
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Issue Dt:
|
12/21/1999
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Application #:
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08827542
|
Filing Dt:
|
03/28/1997
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|
Title:
|
THERMAL PROCESSING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
08/17/1999
|
Application #:
|
08838882
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Filing Dt:
|
04/14/1997
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|
Title:
|
EXHAUST VENT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION SYSTEMS
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|
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Patent #:
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Issue Dt:
|
08/31/1999
|
Application #:
|
08976928
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Filing Dt:
|
11/24/1997
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Title:
|
PROTECTIVE GAS SHIELD FOR CHEMICAL VAPOR DEPOSITION APPARATUS
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|
|
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Patent #:
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Issue Dt:
|
12/15/1998
|
Application #:
|
09008024
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Filing Dt:
|
01/16/1998
|
|
Title:
|
FREE FLOATING SHIELD
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|
|
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Patent #:
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|
Issue Dt:
|
02/22/2000
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Application #:
|
09018021
|
Filing Dt:
|
02/02/1998
|
|
Title:
|
WAFER CARRIER AND SEMICONDUCTOR APPARATUS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
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|
|
|
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Patent #:
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|
Issue Dt:
|
11/02/1999
|
Application #:
|
09019349
|
Filing Dt:
|
02/05/1998
|
|
Title:
|
HIGH TEMPERATURE SUBSTRATE TRANSFER MODULE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
10/09/2001
|
Application #:
|
09373894
|
Filing Dt:
|
08/12/1999
|
|
Title:
|
HOT WALL RAPID THERMAL PROCESSOR
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|
|
|
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Patent #:
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|
Issue Dt:
|
03/27/2001
|
Application #:
|
09480730
|
Filing Dt:
|
01/06/2000
|
|
Title:
|
CHEMICAL VAPOR DEPOSITION SYSTEM AND METHOD
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|
|
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Patent #:
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|
Issue Dt:
|
03/05/2002
|
Application #:
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09492420
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Filing Dt:
|
01/27/2000
|
|
Title:
|
Free floating shield and semiconductor processing system
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|
|
|
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Patent #:
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|
Issue Dt:
|
05/14/2002
|
Application #:
|
09541395
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Filing Dt:
|
03/31/2000
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|
Title:
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Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth
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