Patent Assignment Details
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Reel/Frame: | 019950/0957 | |
| Pages: | 2 |
| | Recorded: | 09/27/2007 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11904374
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Filing Dt:
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09/27/2007
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Publication #:
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Pub Dt:
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07/03/2008
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Title:
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End point detection method applying resonance phenomenon, end point detection apparatus, chemical mechanical polishing apparatus on which the detection apparatus is loaded, and semiconductor device fabricated by the chemical mechanical polishing apparatus
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Assignee
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9-7-1, SHIMORENJAKU |
MITAKA-SHI, TOKYO, JAPAN |
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Correspondence name and address
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PAUL A. FATTIBENE
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FATTIBENE AND FATTIBENE
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2480 POST ROAD
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SOUTHPORT, CONNECTICUT 06890
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