Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 020003/0430 | |
| Pages: | 4 |
| | Recorded: | 10/23/2007 | | |
| Attorney Dkt #: | AM11958/DSM/JP |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11877559
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Filing Dt:
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10/23/2007
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Publication #:
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Pub Dt:
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04/23/2009
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Title:
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PLASMA SURFACE TREATMENT TO PREVENT PATTERN COLLAPSE IN IMMERSION LITHOGRAPHY
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Assignee
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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ROBERT W. MULCAHY
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P.O. BOX 450A
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LEGAL AFFAIRS DEPT.
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SANTA CLARA, CA 95052
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