Patent Assignment Details
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Reel/Frame: | 020067/0821 | |
| Pages: | 3 |
| | Recorded: | 10/26/2007 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11919341
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Filing Dt:
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10/26/2007
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Publication #:
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Pub Dt:
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03/11/2010
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Title:
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Etching method, method for producing dielectric film of low dielectric constant, method for producing porous member, etching system and thin film forming equipment
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Assignee
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ATT EAST 11F, 17-22, AKASAKA 2-CHOME |
MINATO-KU |
TOKYO 107-0052, JAPAN |
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Correspondence name and address
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CHARLES GORENSTEIN
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BIRCH, STEWART, KOLASCH & BIRCH, LLP
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8110 GATEHOUSE ROAD SUITE 100 EAST
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P.O. BOX 747
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FALLS CHURCH, VA 22040-0747
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