Patent Assignment Details
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| Reel/Frame: | 020076/0179 | |
| Pages: | 3 |
| | Recorded: | 11/06/2007 | | |
| Attorney Dkt #: | KLA1P188, KLA1P188P |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/10/2011
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Application #:
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11848158
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Filing Dt:
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08/30/2007
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Title:
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SCATTEROMETRY TARGET EMPLOYING NON-PERIODIC DEFECT FEATURES TO ENHANCE OR OPTIMIZE TARGET SENSITIVITY TO A PARAMETER OF INTEREST
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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BEYER WEAVER LLP
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P.O. BOX 70250
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OAKLAND, CA 94612-0250
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