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Reel/Frame:020100/0068   Pages: 3
Recorded: 11/13/2007
Attorney Dkt #:21270/1200835-US1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/30/2010
Application #:
11739498
Filing Dt:
04/24/2007
Publication #:
Pub Dt:
02/28/2008
Title:
SILICON WAFER ETCHING METHOD AND APPARATUS, AND IMPURITY ANALYSIS METHOD
Assignors
1
Exec Dt:
11/12/2007
2
Exec Dt:
11/12/2007
Assignee
1
1-2-1 SHIBAURA, MINATO-KU
TOKYO, JAPAN 105-8634
Correspondence name and address
JOSEPH R. ROBINSON
P.O. BOX 770, CHURCH STREET STATION
NEW YORK, NY 10008-0770

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