Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 020109/0299 | |
| Pages: | 5 |
| | Recorded: | 11/14/2007 | | |
| Attorney Dkt #: | TEL TO TEL EPION |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
7
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Patent #:
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Issue Dt:
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06/23/2009
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Application #:
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11694557
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Filing Dt:
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03/30/2007
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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APPARATUS AND METHODS FOR SYSTEMATIC NON-UNIFORMITY CORRECTION USING A GAS CLUSTER ION BEAM
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Patent #:
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Issue Dt:
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06/23/2009
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Application #:
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11694572
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Filing Dt:
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03/30/2007
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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METHODS AND PROCESSING SYSTEMS FOR USING A GAS CLUSTER ION BEAM TO OFFSET SYSTEMATIC NON-UNIFORMITIES IN WORKPIECES PROCESSED IN A PROCESS TOOL
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Patent #:
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Issue Dt:
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07/28/2009
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Application #:
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11752774
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Filing Dt:
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05/23/2007
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Publication #:
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Pub Dt:
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11/27/2008
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Title:
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METHOD AND SYSTEM FOR TREATING AN INTERIOR SURFACE OF A WORKPIECE USING A CHARGED PARTICLE BEAM
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Patent #:
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Issue Dt:
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07/21/2009
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Application #:
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11770405
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Filing Dt:
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06/28/2007
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Publication #:
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Pub Dt:
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01/01/2009
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Title:
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METHODS AND APPARATUS FOR ASSIGNING A BEAM INTENSITY PROFILE TO A GAS CLUSTER ION BEAM USED TO PROCESS WORKPIECES
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11830346
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Filing Dt:
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07/30/2007
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Publication #:
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Pub Dt:
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02/05/2009
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Title:
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APPARATUS AND METHODS FOR TREATING A WORKPIECE USING A GAS CLUSTER ION BEAM
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Patent #:
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Issue Dt:
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03/29/2011
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Application #:
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11832198
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Filing Dt:
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08/01/2007
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Publication #:
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Pub Dt:
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02/05/2009
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Title:
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METHOD AND SYSTEM FOR INCREASING THROUGHPUT DURING LOCATION SPECIFIC PROCESSING OF A PLURALITY OF SUBSTRATES
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Patent #:
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Issue Dt:
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12/01/2009
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Application #:
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11850423
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Filing Dt:
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09/05/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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METHODS FOR MODIFYING FEATURES OF A WORKPIECE USING A GAS CLUSTER ION BEAM
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Assignee
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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KRISTI L. DAVIDSON
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441 VINE STREET
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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