Patent Assignment Details
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| Reel/Frame: | 020162/0769 | |
| Pages: | 3 |
| | Recorded: | 11/16/2007 | | |
| Attorney Dkt #: | 04329.4225 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/14/2009
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Application #:
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11896871
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Filing Dt:
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09/06/2007
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Publication #:
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Pub Dt:
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03/13/2008
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Title:
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EXPOSURE METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO 105-8001, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT &
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LLP
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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