Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 020209/0759 | |
| Pages: | 2 |
| | Recorded: | 11/30/2007 | | |
| Attorney Dkt #: | 026531-009300US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/10/2009
|
Application #:
|
11924433
|
Filing Dt:
|
10/25/2007
|
|
Title:
|
METHOD AND APPARATUS FOR DETECTING SUBSTRATE TEMPERATURE IN A TRACK LITHOGRAPHY TOOL
|
|
|
Assignee
|
|
|
|
|
| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU |
| SHIMOGYO-KU, KYOTO, JAPAN 600-8009 |
|
|
Correspondence name and address
|
| |
JENNIFER SMOLEN
|
| |
TOWNSEND AND TOWNSEND AND CREW LLP
|
| |
TWO EMBARCADERO CENTER, 8TH FLOOR
|
| |
SAN FRANCISCO, CA 94111
|
Search Results as of:
05/03/2024 04:53 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
