Patent Assignment Details
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| Reel/Frame: | 020264/0493 | |
| Pages: | 5 |
| | Recorded: | 12/18/2007 | | |
| Attorney Dkt #: | NIKON-1001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11959005
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Filing Dt:
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12/18/2007
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Publication #:
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Pub Dt:
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06/18/2009
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Title:
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APPARATUS AND METHOD FOR ISOLATING VIBRATIONS IN A LITHOGRAPHY MACHINE USING TWO ACTIVE CONTROL UNITS
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Assignee
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| 2-3, MARUNOUCHI, 3-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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Correspondence name and address
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KNOBLE YOSHIDA & DUNLEAVY, LLC
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1628 JOHN F. KENNEDY BOULEVARD
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EIGHT PENN CENTER
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PHILADELPHIA, NJ 19103
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