Patent Assignment Details
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Reel/Frame: | 020416/0491 | |
| Pages: | 4 |
| | Recorded: | 01/25/2008 | | |
Attorney Dkt #: | EP-147 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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12020094
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Filing Dt:
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01/25/2008
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Publication #:
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Pub Dt:
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07/30/2009
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Title:
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METHOD FOR INCREASING THE PENETRATION DEPTH OF MATERIAL INFUSION IN A SUBSTRATE USING A GAS CLUSTER ION BEAM
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Assignee
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37 MANNING ROAD |
BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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KRISTI L. DAVIDSON
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441 VINE STREET
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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